Mks Astron 2l Manual [upd] Now

1 to 10 Torr (measured at the Astron outlet).

Fuse (Input AC), Fold-back current limiting, Overvoltage Crowbar Passive convection via external rear/side heatsinks 3. Installation and Safety Precautions

Maintain water temperature between to prevent internal moisture condensation. Step-by-Step Operation Sequence

The MKS Astron series, specifically the Astron 2L type models (such as the AX7670 or AX7680), represents a mature and industry-standard solution for generating high-density, reactive gas plasmas. These units are designed to dissociate gases like NF₃, O₂, or CF₄ remotely, delivering highly reactive species to a process chamber for rapid chamber cleaning (In-Situ Cleaning) or surface preparation. 1. What is the MKS Astron 2L? mks astron 2l manual

Rotate clockwise to increase voltage and counter-clockwise to decrease voltage.

) is used to strike the initial plasma ignition. Because it acts as a simple asphyxiant, your workspace must maintain an oxygen content of at least 18% by volume. Electrical and Shock Protection

Choose the specific relay (e.g., Relay A) and assign it to a sensor channel. 1 to 10 Torr (measured at the Astron outlet)

Proper physical integration prevents plasma instability and premature hardware failure. Gas Delivery Connection

Unlike modern digital controllers, the Astron 2L requires periodic analog upkeep.

To maintain cleaning efficiency, the transport tube connecting the ASTRON to the process chamber must be short and made of materials minimally reactive to fluorine radicals (to avoid losing the cleaning flux to the tube walls) MKS Instruments Industry Reputation What is the MKS Astron 2L

: The manual highlights a compact, "lid-mountable" architecture that combines the power source , control module , and plasma chamber into one 47-lb unit (approx. Operational and Environmental Responsibility

High temperatures at the interface can accelerate recombination. Effective thermal management (cooling) is essential for maintaining consistent etch rates. 3. Key Specifications at a Glance High Dissociation Typically >95% for cap N cap F sub 3 , reducing gas waste. Self-Contained Compact design simplifies retrofitting on existing tools. Process Stability